EAP - Proceedings of the Estonian Academy of Sciences. Physics. Mathematics Publications

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Proceedings of the Estonian Academy of Sciences. Physics. Mathematics

2007 2006 2005 2004 2003 Vol. 52, Issue 4 Vol. 52, Issue 3 Vol. 52, Issue 2 Vol. 52, Issue 1 2002 2001 2000 1999 1998 1997 1996 1995 1994 1993 1992 1991 1990

2007 2006 2005 2004 2003 Vol. 52, Issue 4 Vol. 52, Issue 3 Vol. 52, Issue 2 Vol. 52, Issue 1 2002 2001 2000 1999 1998 1997 1996 1995 1994 1993 1992 1991 1990

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Effects of growth temperature on the properties of HfO₂ films grown by atomic layer deposition; pp. 308–320

PDF | https://doi.org/10.3176/phys.math.2003.3.07

Authors

Giovanna Scarel, Claudia Wiemer, Sandro Ferrari, Grazia Tallarida, Marco Fanciulli

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