ESTONIAN ACADEMY
PUBLISHERS
eesti teaduste
akadeemia kirjastus
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Proceedings of the Estonian Academy of Sciences. Physics. Mathematics
Atomic layer deposition of ZnO thin films and dot structures; pp. 277–288
PDF | https://doi.org/10.3176/phys.math.2003.3.04

Authors
Marek Godlewski ORCID Icon, Krzysztof Kopalko, Andrzej Szczerbakow ORCID Icon, Elżbieta Łusakowska ORCID Icon, Michał M. Godlewski, Ewa M. Goldys, Kenneth Scott A. Butcher, Matthew R. Phillips
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