EAP - Proceedings of the Estonian Academy of Sciences. Physics. Mathematics Publications

Proceedings of the Estonian Academy of Sciences. Physics. Mathematics

2007 2006 2005 2004 2003 Vol. 52, Issue 4 Vol. 52, Issue 3 Vol. 52, Issue 2 Vol. 52, Issue 1 2002 2001 2000 1999 1998 1997 1996 1995 1994 1993 1992 1991 1990

Open Access Journal

Atomic layer deposition of ZnO thin films and dot structures; pp. 277–288

PDF | https://doi.org/10.3176/phys.math.2003.3.04

Authors

Marek Godlewski, Krzysztof Kopalko, Andrzej Szczerbakow, Elżbieta Łusakowska, Michał M. Godlewski, Ewa M. Goldys, Kenneth Scott A. Butcher, Matthew R. Phillips

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