ESTONIAN ACADEMY
PUBLISHERS
eesti teaduste
akadeemia kirjastus
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Proceedings of the Estonian Academy of Sciences. Physics. Mathematics
High-temperature atomic layer epitaxy of TiO2 from TiCl4 and H2O2–H2O; pp. 257–265
PDF | https://doi.org/10.3176/phys.math.2003.3.02 | Erratum

Authors
Ahti Niilisk, Arnold Rosental, Aivar Tarre, Teet Uustare
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